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| Resist formulation | mr-NIL210- 100nm | mr-NIL210- 200nm | mr-NIL210- 300nm |
| Film thickness（nm） | 100 ± 15 | 200 ± 20 | 500 ± 25 |
| Appearence, colour | clear, colourless | ||
| Dynamic viscosity | 1.4 ± 0.2 | 1.7 ± 0.2 | 2.9 ± 0.5 |
| Density | 0.998 ± 0.005 | 1.004 ± 0.005 | 1.023 ± 0.005 |
| Refractive index | 1.515 ± 0.002 | 1.515 ± 0.002 | 1.517 ± 0.002 |
| Filtration level | 0.1 | 0.1 | 0.1 |
